Single step sequential polydimethylsiloxane wet etching to fabricate a microfluidic channel with various cross-sectional geometries

Journal

Journal of Micromechanics and Microengineering

Journal Volume

27

Journal Issue

11

Date Issued

2017

Author(s)

Wang C.-K.

Liao W.-H.

Wu H.-M.

Lo Y.-H.

Lin T.-R.

DOI

10.1088/1361-6439/aa874d

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85032726754&doi=10.1088%2f1361-6439%2faa874d&partnerID=40&md5=c56b376eb2c12b3aa091c2a7a8166a53

https://scholars.lib.ntu.edu.tw/handle/123456789/467116

Publisher

Institute of Physics Publishing

Type

journal article