https://scholars.lib.ntu.edu.tw/handle/123456789/467228| Title: | Equipment Deterioration Modeling and Causes Diagnosis in Semiconductor Manufacturing | Authors: | Rostami, H. Blue, J. Chen, A. Yugma, C. ARGON CHEN |
Issue Date: | 2018 | Journal Volume: | 2018-August | Start page/Pages: | 1316-1321 | Source: | IEEE International Conference on Automation Science and Engineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/467228 | DOI: | 10.1109/COASE.2018.8560435 |
| Appears in Collections: | 工業工程學研究所 |
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