Data mining and fault diagnosis based on wafer acceptance test data and in-line manufacturing data

Please use this identifier to cite or link to this item: https://scholars.lib.ntu.edu.tw/handle/123456789/467255

Title:	Data mining and fault diagnosis based on wafer acceptance test data and in-line manufacturing data
Authors:	Fan, C.-M. Guo, R.-S. Chen, A. Hsu, K.-C. Wei, C.-S. ARGON CHEN
Issue Date:	2001
Start page/Pages:	171-174
Source:	IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings
URI:	https://scholars.lib.ntu.edu.tw/handle/123456789/467255
DOI:	10.1109/ISSM.2001.962941
Appears in Collections:	工業工程學研究所

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