https://scholars.lib.ntu.edu.tw/handle/123456789/467256
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chen, A. | en_US |
dc.contributor.author | Guo, R.-S. | en_US |
dc.contributor.author | ARGON CHEN | en_US |
dc.creator | ARGON CHEN;Guo, R.-S.;Chen, A. | - |
dc.date.accessioned | 2020-03-02T06:39:58Z | - |
dc.date.available | 2020-03-02T06:39:58Z | - |
dc.date.issued | 2000 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/467256 | - |
dc.relation.ispartof | Run-to-Run Control in Semiconductor Manufacturing | - |
dc.title | Age-based double EWMA controller and its application to a CMP process | en_US |
dc.type | book chapter | en |
dc.identifier.scopus | 2-s2.0-85056912945 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85056912945&partnerID=40&md5=7c2c22f2a70718d3cf151f4e8bead742 | - |
dc.relation.pages | 261-276 | - |
item.fulltext | no fulltext | - |
item.openairetype | book chapter | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
crisitem.author.dept | Industrial Engineering | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 工業工程學研究所 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。