Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition: APC: Advanced process control; AM: Advanced metrology

Journal
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference
Pages
346-352
Date Issued
2018
Author(s)
Yang, W.-T.
Blue, J.
Roussy, A.
Reis, M.
Pinaton, J.
DOI
URI
URL
Type
conference paper

臺大位居世界頂尖大學之列，為永久珍藏及向國際展現本校豐碩的研究成果及學術能量，圖書館整合機構典藏（NTUR）與學術庫（AH）不同功能平台，成為臺大學術典藏NTU scholars。期能整合研究能量、促進交流合作、保存學術產出、推廣研究成果。

To permanently archive and promote researcher profiles and scholarly works, Library integrates the services of “NTU Repository” with “Academic Hub” to form NTU Scholars.

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