https://scholars.lib.ntu.edu.tw/handle/123456789/467298
標題: | Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition: APC: Advanced process control; AM: Advanced metrology | 作者: | Yang, W.-T. Blue, J. Roussy, A. Reis, M. Pinaton, J. JAKEY BLUE |
公開日期: | 2018 | 起(迄)頁: | 346-352 | 來源出版物: | 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/467298 | DOI: | 10.1109/ASMC.2018.8373161 |
顯示於: | 工業工程學研究所 |
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