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College of Engineering / 工學院
Industrial Engineering / 工業工程學研究所
Generalized Overall Equipment Effectiveness for integrated scheduling and process control
Details
Generalized Overall Equipment Effectiveness for integrated scheduling and process control
Journal
IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
Pages
-
Date Issued
2017
Author(s)
Kao, Y.-T.
Chang, S.-C.
Blue, J.
JAKEY BLUE
SHI-CHUNG CHANG
DOI
10.1109/ISSM.2016.7934514
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/467302
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85021105915&doi=10.1109%2fISSM.2016.7934514&partnerID=40&md5=dbfd4db1825490048cb29c353112d0de
SDGs
[SDGs]SDG9
Type
conference paper
