Spatial risk assessment on circular domains: Application to wafer profile monitoring

Journal

2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference

Pages

223-227

Date Issued

2015

Author(s)

Padonou, E.

Roustant, O.

Blue, J.

Duverneuil, H.

DOI

10.1109/ASMC.2015.7164475

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/467307

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963677298&doi=10.1109%2fASMC.2015.7164475&partnerID=40&md5=395671dfee3a43e6ec591640698028ef

Type

conference paper