Efficient FDC based on hierarchical tool condition monitoring scheme

Journal

ASMC (Advanced Semiconductor Manufacturing Conference)

Pages

359-364

Date Issued

2012

Author(s)

Blue, J.

Roussy, A.

Thieullen, A.

Pinaton, J.

DOI

10.1109/ASMC.2012.6212927

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/467312

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84863902218&doi=10.1109%2fASMC.2012.6212927&partnerID=40&md5=04dcaba2de851d3a3ac2bbf185e31d9c

SDGs

[SDGs]SDG9

Type

conference paper