On-line process optimization and control using the sequential design of experiments

Journal

Digest of Technical Papers - Symposium on VLSI Technology

Pages

99-100

Date Issued

1990

Author(s)

Sachs E.

Ha S.

Hu A.

DOI

10.1109/VLSIT.1990.111027

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/472444

URL

https://www2.scopus.com/inward/record.uri?eid=2-s2.0-0025682329&doi=10.1109%2fVLSIT.1990.111027&partnerID=40&md5=a52a8e0efc765080db0a48eef30c0098

Type

conference paper