Laser ablation of silicon using a Bessel-like beam generated by a subwavelength annular aperture structure

Journal

Applied Optics

Journal Volume

50

Journal Issue

34

Pages

6384-6390

Date Issued

2011

Author(s)

Yu, Y.-Y.

Chang, C.-K.

Lai, M.-W.

Huang, L.-S.

DOI

10.1364/AO.50.006384

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486169

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-83155193108&doi=10.1364%2fAO.50.006384&partnerID=40&md5=1cd035d96b6951c705d5e61a9634a20b

Type

journal article