Ablation of silicon by focusing a femtosecond laser through a subwavelength annular aperture structure

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

7789

Date Issued

2010

Author(s)

Yu, Y.Y.

Chang, C.K.

Lai, M.W.

Huang, L.S.

DOI

10.1117/12.859854

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486185

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-77958168183&doi=10.1117%2f12.859854&partnerID=40&md5=3ef25dd1bae507ab65512c8fd04f2ff6

Type

conference paper