Ellipsometer surface plasma resonance

Journal

Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05

Journal Volume

2005

Pages

274-279

Date Issued

2005

Author(s)

Hsu, W.L.

Lee, S.S.

Huang, N.Z.

Chen, Y.W.

Chan, Y.W.

Lee, C.K.

Lai, W.R.

Chen, Y.H.

DOI

10.1109/ICMECH.2005.1529268

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486255

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-33748899476&doi=10.1109%2fICMECH.2005.1529268&partnerID=40&md5=f5fb2690d1f19822c600421bb9c5d50f

Type

conference paper