A new method to fabricate diffractive blazed gratings by an-isotropic etching on (110) silicon wafers

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

3242

Pages

46-51

Date Issued

1997

Author(s)

Yang, L.-J.

Chang, P.-Z.

Lee, C.-K.

DOI

10.1117/12.293547

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486292

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0042981972&doi=10.1117%2f12.293547&partnerID=40&md5=83326a714cdbad75486029d14710ca58

Type

conference paper