A metal micromechanical resonant switch for on-chip power applications

Journal

Technical Digest - International Electron Devices Meeting, IEDM

Date Issued

2011

Author(s)

Lin, Y.

Riekkinen, T.

Li, W.-C.

Alon, E.

Nguyen, C.T.-C.

DOI

10.1109/IEDM.2011.6131593

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486406

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84863031244&doi=10.1109%2fIEDM.2011.6131593&partnerID=40&md5=24d28b8667817bc954493e060376de1e

SDGs

[SDGs]SDG7

Type

conference paper