Acceleration sensitivity of small-gap capacitive micromechanical resonator oscillators

Journal

2010 IEEE International Frequency Control Symposium, FCS 2010

Pages

273-278

Date Issued

2010

Author(s)

Kim, B.

Akgul, M.

Lin, Y.

Li, W.-C.

Ren, Z.

Nguyen, C.T.-C.

DOI

10.1109/FREQ.2010.5556327

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486409

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-77957867446&doi=10.1109%2fFREQ.2010.5556327&partnerID=40&md5=051bc3b1116b47208f5c1d5bd1909e5a

Type

conference paper