Micromechanical resonant displacement gain stages

Journal

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Pages

19-22

Date Issued

2009

Author(s)

Kim, B.

Lin, Y.

Huang, W.-L.

Akgul, M.

Li, W.-C.

Ren, Z.

Nguyen, C.T.-C.

DOI

URI

URL

Type

conference paper