https://scholars.lib.ntu.edu.tw/handle/123456789/486827
標題: | Review on the modeling of electrostatic MEMS | 作者: | Chuang, W.-C. Lee, H.-L. Chang, P.-Z. Hu, Y.-C. PEI-ZEN CHANG |
關鍵字: | Electromechanics; Electrostatics; MEMS; Pull-in voltage | 公開日期: | 2010 | 卷: | 10 | 期: | 6 | 起(迄)頁: | 6149-6171 | 來源出版物: | Sensors | 摘要: | Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices. © 2010 by the authors. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/486827 | ISSN: | 14248220 | DOI: | 10.3390/s100606149 | SDG/關鍵字: | Dynamic characteristic analysis; Electro-mechanics; Electrostatic MEMS; Energy domain; Numerical modeling method; Physical model; Pull-in voltage; Working state; Electromechanical devices; Electrostatics; MEMS; Electrostatic devices; biological model; equipment design; human; instrumentation; methodology; microelectromechanical system; microtechnology; review; static electricity; theoretical model; Equipment Design; Humans; Micro-Electrical-Mechanical Systems; Microtechnology; Models, Biological; Models, Theoretical; Static Electricity |
顯示於: | 應用力學研究所 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。