Review on the modeling of electrostatic MEMS
Journal
Sensors
Journal Volume
10
Journal Issue
6
Pages
6149-6171
Date Issued
2010
Author(s)
Abstract
Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices. © 2010 by the authors.
Subjects
Electromechanics; Electrostatics; MEMS; Pull-in voltage
Other Subjects
Dynamic characteristic analysis; Electro-mechanics; Electrostatic MEMS; Energy domain; Numerical modeling method; Physical model; Pull-in voltage; Working state; Electromechanical devices; Electrostatics; MEMS; Electrostatic devices; biological model; equipment design; human; instrumentation; methodology; microelectromechanical system; microtechnology; review; static electricity; theoretical model; Equipment Design; Humans; Micro-Electrical-Mechanical Systems; Microtechnology; Models, Biological; Models, Theoretical; Static Electricity
Type
review