Fabrication process of integrated multi-analyte biochip system for implantable application
Journal
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages
204-207
Date Issued
2009
Author(s)
Tsai, Y.-C.
Chiu, N.-F.
Liu, P.-C.
Ou, Y.-C.
Liao, H.-H.
Yang, Y.-J.
Yang, L.-J.
Chao, F.-S.
Lu, S.-S.
Lin, C.-W.
Chang, P.-Z.
Abstract
This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.
Type
conference paper