Fabrication of micro-optical switch by post-CMOS micromachining process

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

5455

Pages

274-283

Date Issued

2004

Author(s)

Cheng, Y.-C.

Lee, C.-Y.

Dai, C.-L.

Chen, W.-J.

Chang, P.-Z.

DOI

10.1117/12.545307

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486845

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-8844229674&doi=10.1117%2f12.545307&partnerID=40&md5=1313fa81b9a46f0bf75bf6a5949d53f6

Type

conference paper