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College of Engineering / 工學院
Applied Mechanics / 應用力學研究所
Fabrication of micro-optical switch by post-CMOS micromachining process
Details
Fabrication of micro-optical switch by post-CMOS micromachining process
Journal
Proceedings of SPIE - The International Society for Optical Engineering
Journal Volume
5455
Pages
274-283
Date Issued
2004
Author(s)
Cheng, Y.-C.
Lee, C.-Y.
Dai, C.-L.
Chen, W.-J.
Chang, P.-Z.
PING-HEI CHEN
PEI-ZEN CHANG
DOI
10.1117/12.545307
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/486845
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-8844229674&doi=10.1117%2f12.545307&partnerID=40&md5=1313fa81b9a46f0bf75bf6a5949d53f6
Type
conference paper