https://scholars.lib.ntu.edu.tw/handle/123456789/486855| Title: | Applied electrostatic parallelogram actuators for microwave switches using the standard CMOS process | Authors: | Dai, C.-L. Yen, K. Chang, P.-Z. PEI-ZEN CHANG |
Issue Date: | 2001 | Journal Volume: | 11 | Journal Issue: | 6 | Start page/Pages: | 697-702 | Source: | Journal of Micromechanics and Microengineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/486855 | DOI: | 10.1088/0960-1317/11/6/311 |
| Appears in Collections: | 應用力學研究所 |
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