Fabrication of a micromachined optical modulator using the CMOS process

Journal

Journal of Micromechanics and Microengineering

Journal Volume

11

Journal Issue

5

Pages

612-615

Date Issued

2001

Author(s)

Dai, C.-L.

Chen, H.-L.

DOI

10.1088/0960-1317/11/5/326

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486856

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035443264&doi=10.1088%2f0960-1317%2f11%2f5%2f326&partnerID=40&md5=e7b4fba71cacfd941cb9ccf9ff391b3a

Type

journal article