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College of Engineering / 工學院
Applied Mechanics / 應用力學研究所
Fabrication of a micromachined optical modulator using the CMOS process
Details
Fabrication of a micromachined optical modulator using the CMOS process
Journal
Journal of Micromechanics and Microengineering
Journal Volume
11
Journal Issue
5
Pages
612-615
Date Issued
2001
Author(s)
Dai, C.-L.
Chen, H.-L.
PEI-ZEN CHANG
DOI
10.1088/0960-1317/11/5/326
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/486856
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035443264&doi=10.1088%2f0960-1317%2f11%2f5%2f326&partnerID=40&md5=e7b4fba71cacfd941cb9ccf9ff391b3a
Type
journal article