A wideband electrostatic microwave switch fabricated by surface micromachining

Journal

Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an

Journal Volume

23

Journal Issue

6

Pages

781-787

Date Issued

2000

Author(s)

Chang, C.

Dai, C.-L.

Chen, J.-Y.

Chen, H.

Yen, K.

Chiou, J.-H.

DOI

URI

URL

Type

journal article