In-situ micro strain gauges for measuring residual strain of three cmos thin films using only one maskless post-processing step

Journal

Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an

Journal Volume

20

Journal Issue

5

Pages

539-548

Date Issued

1997

Author(s)

Dai, C.-L.

DOI

URI

URL

Type

journal article