https://scholars.lib.ntu.edu.tw/handle/123456789/486871| Title: | In-situ micro strain gauges for measuring residual strain of three cmos thin films using only one maskless post-processing step | Authors: | Dai, C.-L. Chang, P.-Z. PEI-ZEN CHANG |
Issue Date: | 1997 | Journal Volume: | 20 | Journal Issue: | 5 | Start page/Pages: | 539-548 | Source: | Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/486871 | DOI: | 10.1080/02533839.1997.9741860 |
| Appears in Collections: | 應用力學研究所 |
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