Evidence of a Love wave bandgap in a quartz substrate coated with a phononic thin layer
Journal
Applied Physics Letters
Journal Volume
104
Journal Issue
18
Date Issued
2014
Author(s)
Abstract
This paper presents a numerical and experimental study of Love wave propagation in a micro-fabricated phononic crystal (PC) structure consisting of a 2D, periodically etched silica film deposited on a quartz substrate. The dispersion characteristics of Love waves in such a phononic structure were analyzed with various geometric parameters by using complex band structure calculations. For the experiment, we adopted reactive-ion etching with electron-beam lithography to fabricate a submicrometer phononic structure. The measured results exhibited consistency with the numerical prediction. The results of this study may serve as a basis for developing PC-based Love wave devices.
Type
journal article