Real time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor
Journal
Proceedings of SPIE - The International Society for Optical Engineering
Journal Volume
5455
Pages
319-330
Date Issued
2004
Author(s)
Lee, C.-Y.
Wu, T.-T.
Chen, Y.-Y.
Cheng, Y.-C.
Chen, W.-J.
Pao, S.-Y.
Chang, P.-Z.
Chen, P.-H.
Yen, K.-H.
Type
conference paper