Lissajous scan trajectory with internal model principle controller for fast AFM image scanning
Journal
2015 54th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2015
Pages
469-474
Date Issued
2015
Author(s)
Abstract
Atomic force microscopy (AFM) is a very useful measurement instrument. It can scan the conductive and nonconductive samples and without any restriction in the environments of application. Therefore, it has become an indispensable micro-/nano-scale measurement tool. However, controller of the conventional AFMs do not consider the dynamic characteristics of the scan trajectory and mostly use raster scanning easily to induce the mechanical resonance of the scanner. In an attempt to improve these problems for increasing the scan speed and accuracy, we designed an internal model principle (IMP) based neural network complementary sliding mode control (NNCSMC) for tracking a smooth Lissajous trajectory, which can allow an effectively increasing in the scan speed without obviously sacrificing in the scan accuracy. To validate the effectiveness of the proposed scan methodology, we have conducted extensive experiments and promising results have been acquired. © 2015 The Society of Instrument and Control Engineers-SICE.
Event(s)
54th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2015
Subjects
Atomic force microscopy; high speed scan; internal model principle; Lissajous scan trajectory
SDGs
Other Subjects
Atomic force microscopy; Sliding mode control; Trajectories; Dynamic characteristics; High Speed; Internal model principle; Lissajous; Measurement instruments; Measurement tools; Mechanical resonance; Raster scanning; Controllers
Type
conference paper