https://scholars.lib.ntu.edu.tw/handle/123456789/488899
標題: | Lissajous scan trajectory with internal model principle controller for fast AFM image scanning | 作者: | Wu, J.-W. Lo, Y.-T. Liu, W.-C. LI-CHEN FU |
關鍵字: | Atomic force microscopy; high speed scan; internal model principle; Lissajous scan trajectory | 公開日期: | 2015 | 起(迄)頁: | 469-474 | 來源出版物: | 2015 54th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2015 | 會議論文: | 54th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2015 | 摘要: | Atomic force microscopy (AFM) is a very useful measurement instrument. It can scan the conductive and nonconductive samples and without any restriction in the environments of application. Therefore, it has become an indispensable micro-/nano-scale measurement tool. However, controller of the conventional AFMs do not consider the dynamic characteristics of the scan trajectory and mostly use raster scanning easily to induce the mechanical resonance of the scanner. In an attempt to improve these problems for increasing the scan speed and accuracy, we designed an internal model principle (IMP) based neural network complementary sliding mode control (NNCSMC) for tracking a smooth Lissajous trajectory, which can allow an effectively increasing in the scan speed without obviously sacrificing in the scan accuracy. To validate the effectiveness of the proposed scan methodology, we have conducted extensive experiments and promising results have been acquired. © 2015 The Society of Instrument and Control Engineers-SICE. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/488899 https://www.scopus.com/inward/record.uri?eid=2-s2.0-84960086266&doi=10.1109%2fSICE.2015.7285361&partnerID=40&md5=cb639ca5b72f4c631457fe015a249174 |
DOI: | 10.1109/SICE.2015.7285361 | SDG/關鍵字: | Atomic force microscopy; Sliding mode control; Trajectories; Dynamic characteristics; High Speed; Internal model principle; Lissajous; Measurement instruments; Measurement tools; Mechanical resonance; Raster scanning; Controllers |
顯示於: | 資訊工程學系 |
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