https://scholars.lib.ntu.edu.tw/handle/123456789/489013
標題: | Development of a large scanning-range atomic force microscope with adaptive complementary sliding mode controller. | 作者: | Huang, Kuan-Chia Wu, Jim-Wei Chen, Jyun-Jhih Chen, Chih-Lieh Chen, Mei-Yung LI-CHEN FU |
關鍵字: | adaptive complementary sliding mode control; electromagnetic actuation; monolithic parallel compliant mechanism | 公開日期: | 2012 | 起(迄)頁: | 1685-1690 | 來源出版物: | Proceedings of the IEEE Conference on Decision and Control | 會議論文: | 51st IEEE Conference on Decision and Control, CDC 2012 | 摘要: | Atomic force microscopy (AFM) is a powerful technique to provide high resolution, three-dimensional data for measuring topography of samples. However, the scanning range of conventional AFM systems hardly exceeds hundreds of micrometers due to the piezoelectric actuation. In this research, we develop a large scanning-range AFM system with a z-scanner separated from the xy-scanner. The z-scanner actuated by piezoelectric stack provides high speed scanning and the homemade xy-scanner actuated by electromagnetic actuation is capable of 2 mm×2 mm large field positioning with 17 nm rms error. The overall AFM system consists of a commercial piezoelectric positioner, four sets of electromagnetic actuator, a monolithic parallel compliant mechanism, and an eddy current damper. Moreover, a compact disk/digital versatile disk pick-up-head (CD/DVD PUH) is applied to measure the amplitude of the cantilever. Furthermore, we design an adaptive complementary sliding mode controller to deal with the unknown parameters, unmodeled system uncertainties, and the external disturbances. Finally, preliminary experimental results demonstrate the capability of the proposed system. © 2012 IEEE. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/489013 https://www.scopus.com/inward/record.uri?eid=2-s2.0-84874277236&doi=10.1109%2fCDC.2012.6426057&partnerID=40&md5=11540116f421fc042e623fc244952557 |
ISSN: | 07431546 | DOI: | 10.1109/CDC.2012.6426057 | SDG/關鍵字: | Actuators; Atomic force microscopy; Compliant mechanisms; Controllers; Mechanisms; Piezoelectricity; Scanning; Sliding mode control; Topography; Electromagnetic actuation; Electromagnetic actuators; External disturbances; Parallel compliant mechanisms; Piezoelectric actuation; Sliding mode controller; System uncertainties; Three-dimensional data; Adaptive control systems |
顯示於: | 資訊工程學系 |
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