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College of Electrical Engineering and Computer Science / 電機資訊學院
Computer Science and Information Engineering / 資訊工程學系
An effective system for parameter optimization in photolithography process of a LGP stamper.
Details
An effective system for parameter optimization in photolithography process of a LGP stamper.
Journal
Neural Computing and Applications
Journal Volume
24
Journal Issue
6
Pages
1391-1401
Date Issued
2014
Author(s)
WEN-CHIN CHEN
Jiang, Xiao-Yun
Chang, Hui-Pin
Chen, Hisa-Ping
DOI
10.1007/s00521-013-1353-7
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/490314
URL
https://doi.org/10.1007/s00521-013-1353-7
SDGs
[SDGs]SDG9
Type
journal article
