Parameter optimization of etching process for a LGP stamper.

Journal

Neural Computing and Applications

Journal Volume

23

Journal Issue

6

Pages

1539-1550

Date Issued

2013

Author(s)

Tai, Yi-Chia

Wang, Min-Wen

Tsai, Hsiang-Cheng

DOI

10.1007/s00521-012-1103-2

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/490316

URL

https://doi.org/10.1007/s00521-012-1103-2

Type

journal article