Fabrication of autocloned photonic crystals by using high-density-plasma chemical vapor deposition

Journal

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Journal Volume

22

Journal Issue

6

Pages

3359-3362

Date Issued

2004

Author(s)

Chen, H.L.

Lee, H.F.

Chao, W.C.

Hsieh, C.I.

Ko, F.H.

Chu, T.C.

DOI

URI

URL

SDGs

[SDGs]SDG16

Type

conference paper