Thermal-flow techniques for sub-35 nm contact-hole fabrication in electron-beam lithography

Journal

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Journal Volume

20

Journal Issue

6

Pages

2973-2978

Date Issued

2002

Author(s)

Chen, H.L.

Chen, C.H.

Ko, F.H.

Chu, T.C.

Pan, C.T.

Lin, H.C.

DOI

URI

URL

Type

journal article