Fabry-Perot-type antireflective coating for deep-ultraviolet binary photomask applications

Journal

Applied Optics

Journal Volume

41

Journal Issue

19

Pages

3961-3965

Date Issued

2002

Author(s)

Chen, H.-L.

Chu, T.-C.

Hsu, C.-K.

Ko, F.-H.

Huang, T.-Y.

DOI

10.1364/AO.41.003961

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491381

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0036642131&doi=10.1364%2fAO.41.003961&partnerID=40&md5=cad24aaa8117a73ec9cc78c139aff642

Type

journal article