High-quality and highly-transparent AlN template on annealed sputter-deposited AlN buffer layer for deep ultra-violet light-emitting diodes
Journal
AIP Advances
Journal Volume
7
Journal Issue
5
Date Issued
2017
Author(s)
Huang, C.-Y.
Wu, P.-Y.
Chang, K.-S.
Lin, Y.-H.
Peng, W.-C.
Chang, Y.-Y.
Li, J.-P.
Yen, H.-W.
Wu, Y.S.
Miyake, H.
Kuo, H.-C.
Type
journal article