Investigation on optical and electrical properties of ZnO sandwich structure with metal interlayer
Journal
Japanese Journal of Applied Physics
Journal Volume
53
Journal Issue
5 SPEC. ISSUE 1
Date Issued
2014
Author(s)
Abstract
The dielectric-metal-dielectric (DMD) sandwich structure is fabricated by the RF magnetron sputtering. The effects of sputtering voltage, thickness of the metal layer, and process temperatures on the optical, crystalline structure, and electrical properties of the zinc oxide (ZnO) films were investigated by UV-vis spectrometry, X-ray diffraction and electron energy loss spectroscopy (EELS). Silver, copper and aluminum are used for the DMD sandwich metal layer in this research. The thickness of the dielectric films is decided by admittance loci analysis base on the selected metal characteristic. The optical average transmittance in the visible spectrum and bulk resistivity of the DMD with intermediate Ag layer can reach 85% and 3×10%5Ω cm, respectively. © 2014 The Japan Society of Applied Physics.
SDGs
Type
conference paper