Structural analysis of Au/TiO2thin films deposited on the glass substrate
Journal
Applied Physics Letters
Journal Volume
102
Journal Issue
9
Date Issued
2013
Author(s)
Abstract
Analytical electron microscopy has revealed the structure of thin films of thermally evaporated Au on atomic layer deposition (ALD) TiO2 deposited on glass substrates. An 11 nm thick TiO2 film was deposited at 200 °C with 417 ALD cycles using tetrakisdimethylamido titanium and H2O precursors. The Au film comprised small particles with diameters of ∼15 nm or less grown by Volmer-Weber growth mechanism on the TiO2 layer. Transmission electron microscopy analysis of the ALD TiO2 layer showed that it was amorphous and had Ca atoms incorporated into the film probably from the lime glass substrate. The effect of Ca atoms included in the TiO2 layer on the growth of Au particles is discussed.
Type
journal article