Effects of iridium oxide thickness and post annealing temperature on the size and density of core-shell IrOx-based nanocrystals of a nonvolatile memory device
Journal
ECS Transactions
Journal Volume
41
Journal Issue
3
Pages
115-119
Date Issued
2011
Author(s)
Abstract
The purpose of this study is to investigate the size and density of IrOx nanocrystals with the conditions of two iridium oxide thicknesses under two post deposition annealing temperature treatments. Through the microstructural investigation, growing mechanism of IrOx nanocrystals is well explained.
SDGs
Type
conference paper