https://scholars.lib.ntu.edu.tw/handle/123456789/491749| Title: | Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition | Authors: | Shih, H.-Y. Lin, M.-C. Chen, L.-Y. Chen, M.-J. MIIN-JANG CHEN |
Issue Date: | 2015 | Journal Volume: | 26 | Journal Issue: | 1 | Source: | Nanotechnology | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/491749 | DOI: | 10.1088/0957-4484/26/1/014002 |
| Appears in Collections: | 材料科學與工程學系 |
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