Accelerating the oxidation rate of AlN substrate through the addition of water vapor

Journal

Journal of Asian Ceramic Societies

Journal Volume

5

Journal Issue

4

Pages

381-384

Date Issued

2017

Author(s)

Yeh, C.-T.

Tuan, W.-H.

DOI

10.1016/j.jascer.2017.08.001

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/492142

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85028458415&doi=10.1016%2fj.jascer.2017.08.001&partnerID=40&md5=efc650611a8d88f3fcbf29d14904abb9

Type

journal article