Ultra-thin Cr 2 O 3 well-crystallized films for high transmittance APSM in ArF line

Journal

Microelectronic Engineering

Journal Volume

67-68

Pages

17-23

Date Issued

2003

Author(s)

Lai, F.D.

Huang, C.Y.

Chang, C.M.

Wang, L.A.

DOI

10.1016/S0167-9317(03)00179-5

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/497269

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0037683144&doi=10.1016%2fS0167-9317%2803%2900179-5&partnerID=40&md5=0fc0cf7c0316401046a32b636cc1932e

Type

conference paper