CMOS-based tactile sensors using oxide as sacrificial layer

Journal
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages
1895-1898
Date Issued
2013
Author(s)
Lin, Y.-C.
Hsieh, C.-J.
Sun, C.-T.
Liou, J.-C.
WEI-CHENG TIAN 
DOI
URI
URL
Type
conference paper

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