https://scholars.lib.ntu.edu.tw/handle/123456789/497759| Title: | CMOS-based tactile sensors using oxide as sacrificial layer | Authors: | Lin, Y.-C. Hsieh, C.-J. Sun, C.-T. Liou, J.-C. Tian, W.-C. WEI-CHENG TIAN |
Issue Date: | 2013 | Start page/Pages: | 1895-1898 | Source: | 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/497759 | DOI: | 10.1109/Transducers.2013.6627162 |
| Appears in Collections: | 電機工程學系 |
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