Recent research and challenges in multiple patterning layout decomposition

Journal

Proceedings of IEEE Computer Society Annual Symposium on VLSI, ISVLSI

Journal Volume

2018-July

Pages

498-499

Date Issued

2018

Author(s)

Jiang, I.H.-R.

Chang, H.-Y.

DOI

10.1109/ISVLSI.2018.00096

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/497912

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85052112343&doi=10.1109%2fISVLSI.2018.00096&partnerID=40&md5=5809ee5f33a74b74bdf5a61ee9fc5ea7

SDGs

[SDGs]SDG11

Type

conference paper