SiC and Si Quantum Dots Co-Precipitated Si-Rich SiC Film with n- and p-Type Dopants Grown by Hydrogen-Free PECVD
Journal
Ecs Journal of Solid State Science and Technology
Journal Volume
2
Journal Issue
9
Pages
N159-N164
Date Issued
2013
Author(s)
Tai, Hung-Yu
Lee, Chiao-Ti
Tsai, Lin-Hsuan
Lin, Yung-Hsiang
Pai, Yi-Hao
Wu, Chih-I.
SDGs
Type
journal article