Thin silicon shadow masks for Organic Light Emitting Diodes (OLED) deposition processes

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

6414

Date Issued

2007

Author(s)

Tseng, C.-C.

Chiu, C.-W.

Zhung, K.-X.

Lee, J.-H.

GUO-DUNG JOHN SU

DOI

10.1117/12.692440

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/498338

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-34247336894&doi=10.1117%2f12.692440&partnerID=40&md5=422de2be9334546885c62798ac565190

Type

conference paper