https://scholars.lib.ntu.edu.tw/handle/123456789/498792
Title: | High-performance metal/SiO <inf>2</inf> /InSb capacitor fabricated by photoenhanced chemical vapor deposition | Authors: | Sun, T.-P. Lee, S.-C. Liu, K.-C. Pang, Y.-M. Yang, S.-J. SI-CHEN LEE |
Issue Date: | 1990 | Journal Volume: | 68 | Journal Issue: | 7 | Start page/Pages: | 3701-3706 | Source: | Journal of Applied Physics | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/498792 | DOI: | 10.1063/1.346334 |
Appears in Collections: | 電機工程學系 |
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