Nano-patterning for LED light extraction and for nanorod LED array formation
Journal
Proceedings of SPIE - The International Society for Optical Engineering
Journal Volume
7784
Date Issued
2010
Author(s)
Abstract
Natural lithography is realized by spin-coating of nanoparticles. The surface textured LED s and nanorod structured LEDs have been made successfully. Concentrated radiation profiles of nanorod structured and surface textured LED are both observed. We fabricate these nano-structure by nature lithography method which use silica nanosphere as etching mask. The SiO2 grown by PECVD is used as a space layer to realize the nanorod LED. Furthermore, we suggest a light guided concept of the highly concentrated phenomena. The highest output power density of nanorod LEDs is achieved. The reversed current of nanorod LEDs is also reduced down to nA level.
Type
conference paper