https://scholars.lib.ntu.edu.tw/handle/123456789/500394
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Yang, C.-W. | en_US |
dc.contributor.author | Chou, C. | en_US |
dc.contributor.author | Chen, W.-C. | en_US |
dc.contributor.author | HAO-HSIUNG LIN | en_US |
dc.date.accessioned | 2020-06-11T06:39:36Z | - |
dc.date.available | 2020-06-11T06:39:36Z | - |
dc.date.issued | 2018 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/500394 | - |
dc.relation.ispartof | Vacuum | - |
dc.title | A single nano-void precisely positioned in SiO<inf>2</inf>/Si substrate by focused helium ion beam technique | en_US |
dc.type | journal article | en |
dc.identifier.doi | 10.1016/j.vacuum.2018.03.029 | - |
dc.identifier.scopus | 2-s2.0-85044455513 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85044455513&doi=10.1016%2fj.vacuum.2018.03.029&partnerID=40&md5=7fa7e0f426bb2e957b8d47315ec2a339 | - |
dc.relation.pages | 188-192 | - |
dc.relation.journalvolume | 152 | - |
item.cerifentitytype | Publications | - |
item.openairetype | journal article | - |
item.fulltext | no fulltext | - |
item.grantfulltext | none | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
crisitem.author.dept | Photonics and Optoelectronics | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.orcid | 0000-0003-3408-6538 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
顯示於: | 電機工程學系 |
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