A low voltage CMOS-based capacitive micromachined ultrasonic sensors development
Journal
Proceedings of IEEE Sensors
Date Issued
2012
Author(s)
Tien, Y.-S.
Ku, P.-C.
Lin, F.-Y.
Li, P.-C.
Lu, L.-H.
Kuo, P.-L.
WEI-CHENG TIAN
SDGs
Type
conference paper