Abbe singular-value decomposition: Compact Abbe's kernel generation for microlithography aerial image simulation using singular-value decomposition method

Journal

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Journal Volume

26

Journal Issue

6

Pages

2322-2330

Date Issued

2008

Author(s)

Chen, C.C.P.

Gurhanli, A.

Chiang, T.-Y.

Hong, J.-J.

Melvin, L.S.

DOI

URI

URL

Type

journal article