https://scholars.lib.ntu.edu.tw/handle/123456789/501954| Title: | Overlay-Aware Detailed Routing for Self-Aligned Double Patterning Lithography Using the Cut Process | Authors: | Liu, Iou-Jen Fang, Shao-Yun Chang, Yao-Wen YAO-WEN CHANG |
Issue Date: | 2016 | Journal Volume: | 35 | Journal Issue: | 9 | Start page/Pages: | 1519-1531 | Source: | Ieee Transactions on Computer-Aided Design of Integrated Circuits and Systems | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/501954 | ISSN: | 0278-0070 | DOI: | 10.1109/TCAD.2015.2513670 |
| Appears in Collections: | 電信工程學研究所 |
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