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College of Electrical Engineering and Computer Science / 電機資訊學院
Photonics and Optoelectronics / 光電工程學研究所
Oxygen-deficient indium tin oxide thin films annealed by atmospheric pressure plasma jets with/without air-quenching
Details
Oxygen-deficient indium tin oxide thin films annealed by atmospheric pressure plasma jets with/without air-quenching
Journal
Applied Surface Science
Journal Volume
292
Pages
213-218
Date Issued
2014
Author(s)
Liao, W.-Y.
Chang, H.
Yang, Y.-J.
Hsu, C.-C.
Cheng, I.-C.
JIAN-ZHANG CHEN
DOI
10.1016/j.apsusc.2013.11.118
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/502031
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893644647&doi=10.1016%2fj.apsusc.2013.11.118&partnerID=40&md5=4d145512011301aa16bff31bbd3c68b7
SDGs
[SDGs]SDG6
Type
journal article
